Experts in Substrate Heating

Vacuum Furnaces

At Thermic Edge, we pride ourselves on being at the forefront of the vacuum furnace industry. Providing a complete service, our bespoke versatile ranges gives you the tools necessary for any application.

High Temperature Vacuum Furnaces Overview

Thermic Edge supply a standard range of High Temperature Vacuum Furnaces, heating up to 3000˚c. Applications for Research and Industry include: Thermal Processing, Annealing, vacuum sintering and vacuum heat treatment in a high purity, clean environment.

Our Semi-Automatic Vacuum Furnaces allow the use of single or multiple gasses allowing processing from atmospheric pressure to high vacuum with either graphite or tungsten hot zones all controlled via a simple one click HMI touchscreen display based on a small footprint, lightweight and moveable frame.

The Thermic Edge design team work closely with clients to provide:

  • Professionally managed projects from start to finish
  • Cost effective solutions using standard Thermic Edge components and assemblies where possible
  • Detailed technical drawings and written specifications
  • 3D CAD models
  • A heating solution that is supplied fully tested and ready to integrate with your system
  • Manual detailing installation and operation instructions

Laboratory Vacuum Furnaces Range

Thermic Edge provide solutions for sample transfer for all deposition system applications. We work closely with our customers to integrate our sample heater stages with their loading systems. Stages can be top or bottom mounted, with manual or automatic sample loading / wafer transfer.

This large travelling platform design can accommodate a single bellows size up to ø93.0mm (internal, through bore) or multiple DN16-35/40CF bellows (3x max) for varying feedthroughs.

Linear manipulators of this style can be fitted with varying positional encoders and scales upon request. They can be configured with mounting flanges ranging from DN2022-350CF (Conflat) or ISO200-400K/F (ISO clamped/bolted) and standard strokes of either 50,100 or 250mm.

Upon request, our in-house design and engineering team can accommodate larger flange sizes and/or increased stroke lengths (up to 1000mm) as well as top flange X-alignment and tilting configurations, to suit your individual requirements.

Laboratory Furnace Options

  • Graphite crucible & wafer laboratory vacuum furnace
  • Tungsten crucible & wafer laboratory vacuum furnace
  • Graphite crucible & wafer benchtop vacuum furnace
  • Tungsten crucible & wafer benchtop vacuum furnace

We also specialise in meeting the requirements of our customers with custom options for their system designed specifically for their needs and applications.

Crucible Furnaces (Crucible Sizes)

  • 2000°c Medium Laboratory Vacuum Furnace with Graphite Hot Zone Crucible Furnace, 5kW DC PSU. Graphite Hot Zone – Ø60.5 x 75mm OR Ø102mm x 51mm
  • 2000°c Large Laboratory Vacuum Furnace with Graphite Hot Zone Crucible Furnace, 15kW DC PSU. Graphite Hot Zone – Ø150 x 75mm
  • 2000°c Extra Large Laboratory Vacuum Furnace with Graphite Hot Zone Crucible Furnace, 20kW DC PSU. Graphite Hot Zone – Ø80 x 140mm
  • 2000°c Large Laboratory Vacuum Furnace with Tungsten Hot Zone Crucible Furnace, 5kW DC PSU. Tungsten Hot Zone – Ø150 x 75mm
  • 2000°c Extra Large Laboratory Vacuum Furnace with Tungsten Hot Zone Crucible Furnace, 20kW DC PSU. Graphite Hot Zone – Ø80 x 140mm

Wafer Heating (Wafer Sizes)

  • 4” Graphite Hot Zone, 5kW DC PSU
  • 4” Tungsten Hot Zone, 5kW DC PSU
  • 6” Graphite Hot Zone, 10kW DC PSU
  • 6” Tungsten Hot Zone, 10kW DC PSU
  • 8” Graphite Hot Zone, 15kW DC PSU
  • 8” Tungsten Hot Zone, 15kW DC PSU

Benchtop Furnaces (Crucible and Wafer Sizes)

  • 2000˚c Graphite Crucible Furnace 1.5kW DC PSU – Ø20 x 30mm, Ø30 x 40mm, Ø40 x 50mm
  • 3000˚c Graphite Crucible Furnace 6kW DC PSU – Ø20 x 30mm, Ø30 x 40mm, Ø40 x 50mm
  • 3000˚c TiCᶾ Crucible Furnace 6kW DC PSU – Ø20 x 30mm, Ø30 x 40mm, Ø40 x 50mm
  • 2000˚c Graphite Wafer Furnace 1.5kW DC PSU – 1”, 2” & 3”
  • 2000˚c Tungsten Wafer Furnace 3kW DC PSU – 1”, 2” & 3”
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