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Heater Stages
At Thermic Edge, we pride ourselves on being at the forefront of the vacuum furnace industry. Providing a complete service, our bespoke versatile ranges gives you the tools necessary for any application.
Thermic Edge offers a complete range of hot stage sample heaters for all deposition system applications. Heaters and samples can be mounted in any orientation and our range of manipulators provides cost effective options for sample rotation, heater rotation, sample transfer and sample / heater positioning.
This large travelling platform design can accommodate a single bellows size up to ø93.0mm (internal, through bore) or multiple DN16-35/40CF bellows (3x max) for varying feedthroughs.
Linear manipulators of this style can be fitted with varying positional encoders and scales upon request. They can be configured with mounting flanges ranging from DN2022-350CF (Conflat) or ISO200-400K/F (ISO clamped/bolted) and standard strokes of either 50,100 or 250mm.
Upon request, our in-house design and engineering team can accommodate larger flange sizes and/or increased stroke lengths (up to 1000mm) as well as top flange X-alignment and tilting configurations, to suit your individual requirements.
| Standard Features | SMF01 | SMF02 | SMF03 | SMF04 | SMF05 | SMF06 |
| Max Operating Temperature | 1000 | 1000 | 1000 | 1800 | 1800 | 1200 |
| Rotating Head | No | No | No | No | Yes | No |
| Rotating shaft sample Holder | Yes | Yes | Yes | Yes | No | Yes |
| Rotating Cradle sample holder | No | No | No | No | No | Yes |
| Central Shaft | Yes | Yes | Yes | Yes | Yes | Yes |
| Motor – belt driven | Yes | Yes | No | No | Yes | Yes |
| Motor – Direct drive | No | No | Yes | Yes | No | No |
| Power Feedthroughs | Yes | No | Yes | Optional | No | No |
| T/C Feedthrough | Yes | No | Yes | Optional | No | No |
| Optional Features | SMF01 | SMF02 | SMF03 | SMF04 | SMF05 | SMF06 |
| Water cooling – Base | Yes | No | Yes | Yes | Yes | Yes |
| Water Cooling – Heatshield | Yes | Yes | Yes | Yes | Yes | Yes |
| Water Feedthrough | Yes | No | Yes | Yes | No | No |
| RF / DC Bias | Yes | Yes | No | Yes | Yes | Yes |
| Z-Shift for sample transfer | Yes | Yes | Yes | Yes | No | Yes |
| Z shift to move heater head | Yes | Yes | Yes | Yes | Yes | Yes |
| Z shift to move Sample holder | Yes | Yes | Yes | Yes | Yes | Yes |
| Linear Movement for Pin Lift | No | No | No | Yes | No | No |
At Thermic Edge, we pride ourselves on being at the forefront of the Vacuum Heating Technology Industry. We provide a complete service, our bespoke and versatile ranges give you the tools necessary for any inert, HV or UHV application.
This website uses cookies to ensure you get the best experience. Please see our Privacy Policy for more information.