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Experts in Substrate Heating

Heater Stages

At Thermic Edge, we pride ourselves on being at the forefront of the vacuum furnace industry. Providing a complete service, our bespoke versatile ranges gives you the tools necessary for any application.

Standard Heater Stages

Thermic Edge offers a complete range of hot stage sample heaters for all deposition system applications. Heaters and samples can be mounted in any orientation and our range of manipulators provides cost effective options for sample rotation, heater rotation, sample transfer and sample / heater positioning.

This large travelling platform design can accommodate a single bellows size up to ø93.0mm (internal, through bore) or multiple DN16-35/40CF bellows (3x max) for varying feedthroughs.

Linear manipulators of this style can be fitted with varying positional encoders and scales upon request. They can be configured with mounting flanges ranging from DN2022-350CF (Conflat) or ISO200-400K/F (ISO clamped/bolted) and standard strokes of either 50,100 or 250mm.

Upon request, our in-house design and engineering team can accommodate larger flange sizes and/or increased stroke lengths (up to 1000mm) as well as top flange X-alignment and tilting configurations, to suit your individual requirements.

Features

  • Standard linear shifts with travel up to 250 mm (10”). Longer available as specials.
  • Sample rotation through central shaft or outer cradle.
  • Sample biasing (RF or DC) up to 1000W.
  • Water-cooling to protect feedthroughs and / or reduce heat load on the chamber.
  • Configurations for high vacuum, UHV, oxygen, air and corrosive environments.
  • Temperatures up to 1800°C as standard (higher temperatures can be achieved on request).
  • Supplied with suitable internal thermocouple to measure control temperature.
  • In-vacuum and air side cable assemblies included .
  • Built and tested in the UK.

Specifications

Standard FeaturesSMF01SMF02SMF03SMF04SMF05SMF06
Max Operating Temperature100010001000180018001200
Rotating HeadNoNoNoNoYesNo
Rotating shaft sample HolderYesYesYesYesNoYes
Rotating Cradle sample holderNoNoNoNoNoYes
Central ShaftYesYesYesYesYesYes
Motor – belt drivenYesYesNoNoYesYes
Motor – Direct driveNoNoYesYesNoNo
Power FeedthroughsYesNoYesOptionalNoNo
T/C FeedthroughYesNoYesOptionalNoNo

Optional Features

Optional FeaturesSMF01SMF02SMF03SMF04SMF05SMF06
Water cooling – BaseYesNoYesYesYesYes
Water Cooling – HeatshieldYesYesYesYesYesYes
Water FeedthroughYesNoYesYesNoNo
RF / DC BiasYesYesNoYesYesYes
Z-Shift for sample transferYesYesYesYesNoYes
Z shift to move heater headYesYesYesYesYesYes
Z shift to move Sample holderYesYesYesYesYesYes
Linear Movement for Pin LiftNoNoNoYesNoNo
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