Experts in Substrate Heating

Heater Stages

At Thermic Edge, we pride ourselves on being at the forefront of the vacuum furnace industry. Providing a complete service, our bespoke versatile ranges gives you the tools necessary for any application.

Sample Transfer

Thermic Edge provide solutions for sample transfer for all deposition system applications. We work closely with our customers to integrate our sample heater stages with their loading systems. Stages can be top or bottom mounted, with manual or automatic sample loading / wafer transfer.

This large travelling platform design can accommodate a single bellows size up to ø93.0mm (internal, through bore) or multiple DN16-35/40CF bellows (3x max) for varying feedthroughs.

Linear manipulators of this style can be fitted with varying positional encoders and scales upon request. They can be configured with mounting flanges ranging from DN2022-350CF (Conflat) or ISO200-400K/F (ISO clamped/bolted) and standard strokes of either 50,100 or 250mm.

Upon request, our in-house design and engineering team can accommodate larger flange sizes and/or increased stroke lengths (up to 1000mm) as well as top flange X-alignment and tilting configurations, to suit your individual requirements.

Features

  • Heaters and samples can be mounted in any orientation
  • Our standard range of Z-shifts or pin lift provides cost effective sample transfer solutions
  • Standard linear shifts with travel up to 250 mm (10”)
  • Outer cradle sample rotation for high temperature uniformity across sample
  • High precision servo / stepper motors allow home positioning for loading and unloading
  • Proximity sensors and micro switches for defining Z position and rotation position (required for stepper motors)
  • Configurations for high vacuum, UHV, oxygen, air and corrosive environments
  • Temperatures up to 1600°C as standard (higher temperatures can be achieved on request)
  • Fully customisable with complete bespoke solutions available
  • Built and tested in the UK

See our Heater Stages brochure for more information on sample transfer.

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