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Experts in Substrate Heating

Vacuum Heaters

At Thermic Edge, we pride ourselves on being at the forefront of the vacuum furnace industry. Providing a complete service, our bespoke versatile ranges gives you the tools necessary for any application.

High Temperature - High Uniformity - Water Cooled Heaters

On this page, you will find information on our standard heating solutions that we offer in addition to our Versatile and Button heater ranges. These include:

  • 1000°C graphite or carbon-carbon composite (CCC) inert and vacuum compatible ceramic topped heater
  • 1300°C high uniformity SiC3 coated graphite inert, air and vacuum compatible ceramic topped substrate heater
  • 1700°C CCC inert and vacuum compatible ceramic topped heater (water cooled)
  • 1900°C All Graphite Heaters inert and vacuum compatible

Any of these heaters can be integrated with our stages to provide:

  • Rotable wafer
  • Z-shift
  • RF or DC bias up to 1000W
  • Water or gas cooling

1000°c - sIc3 cOATED GRAPHITE OR ccc (iNERT & vACUUM)

FEATURES

  • Top plate temperature is 1000C, element temperature approximately 1200C.
  • For use in high vacuum, UHV, inert atmosphere & O2 environments.
  • Custom sizes available on request.
  • Fast ramp rates
  • Heater includes internal heat shielding
  • Heater base is water cooled, reducing heat load on chamber and sensitive equipment.
  • Heater is fitted with type K ceramic sheathed thermocouple.
  • Can be mounted to linear and or rotary actuator or in any orientation.
  • Heater can be free standing or flange mounted.
  • Water, power and thermocouple services can exit rear of or side of heater base.
  • Ø1” Heater will fit through NW38CF flange fully assembled (middle picture above)

Product Brochures

200.06-A - 1000°C CCC Element Heater Head Only

Click to Download our product brochure for the Thermic Edge 1000°C Carbon-Carbon Composite Element Heater (Head only).

200.07-B - 1000°C CCC Element Heater Flange Mount​

Click to Download our product brochure for the Thermic Edge 1000°C Carbon-Carbon Composite Element Heater (Flange mount).

SPECIFICATIONS

1000°C SiC3 Element – Air, O2, Inert, HV, UHV  Heater head only
Part NoØA – Hot ZoneØB – Heater o.d.C – Heater ThicknessMounting*Voltage Max*Current Max*Power Max
HTWM6-SiC-0126mm (1”)36.6mm52mmM6 stud6v39a234w
HTWM6-SiC-01.538.1mm (1.5”)48.7mm52mmM6 stud10v39a390w
HTWM6-SiC-0250.8mm (2”)61.4mm52mmM6 stud15v39a585w
1000°C CCC Element – Inert, HV, UHV  Heater Head Only
Part NoØA – Hot ZoneØB – Heater o.d.C – Heater ThicknessMounting*Voltage Max*Current Max*Power Max
HTWM6-CCC-0126mm (1”)36.6mm52mmM6 stud6v39a234w
HTWM6-CCC-01.538.1mm (1.5”)48.7mm52mmM6 stud10v39a390w
HTWM6-CCC-0250.8mm (2”)61.4mm52mmM6 stud15v39a585w

*In Vacuum @ 1000°C (Element Temp.)

1300°C High Uniformity SiC3 Coated Graphite Substrate Heaters (Inert, Air, Vacuum)

Our high temperature oxygen resistant heaters using solid Silicon Carbide (SiC) or SiC coated graphite elements

FEATURES

  • Top plate temperature is 1300C, element temperature approximately 1500C.
  • High temperature uniformity of <2% on top plate.
  • Fast ramp rates, up to 1300C per minute (depending on power supply used)
  • 1300°C Ceramic top plate temperature (1500°C element temperature)
  • Can be pushed to 1600C for short periods
  • Limited to 1000°C top plate temperature in high vacuum
  • Temperature uniformity ±1.0%
  • Integrated thermocouple (type depends on usage temperature and environment)
  • Tested with multiple thermocouples and FLIR thermal imaging camera
  • Can be mounted in any orientation
  • Sample can be placed directly onto heater ceramic top plate
  • Certain samples can be placed directly onto the element
  • Standard sizes from Ø1” to Ø8”
  • For use in high vacuum, inert atmosphere and O2 / air
  • Custom shapes and sizes available on request
  • Water cooling as standard
  • Usually mounted on a base flange with integrated power, and water-cooling feedthroughs, but can be customer defined

Product Brochures

200.06-A - 1000°C CCC Element Heater Head Only

Click to Download our product brochure for the Thermic Edge 1000°C Carbon-Carbon Composite Element Heater (Head only).

200.07-B - 1000°C CCC Element Heater Flange Mount​

Click to Download our product brochure for the Thermic Edge 1000°C Carbon-Carbon Composite Element Heater (Flange mount).

SPECIFICATIONS

Part NoØ Wafer sizeØA – Hot ZoneØB – Heater o.d.C – Heater Thickness*Voltage Max*Current Max*Power Max
HTSW-CCC-0377mm (3”)901494260251500
HTSW-CCC-04102mm (4”)1161754260402400
HTSW-CCC-05128mm (5”)1412004260603600
HTSW-CCC-06153mm (6”)1662254260804800
HTSW-CCC-07179mm (7”)19225142601106600
HTSW-CCC-08204mm (8”)21827742601408400

*In Vacuum @ 1200°C



1700°C Ceramic Topped in Vacuum Heater with SiC3 coated graphite or Carbon-Carbon Composite (CCC) Substrate Heaters Inert and Vacuum

Our highest standard heaters will operate with a top plate temperature at 1700°C.  The heater size can be increased as required. 

FEATURES

  • 1700°C Ceramic top plate temperature
  • Integrated type C thermocouple
  • Can be mounted in any orientation
  • Ø1” version shown is CF40 flange mounted and fits fully assembled through a Ø38mm port
  • Water-cooled feedthroughs and body as standard
  • Heats to 1700°C top plate temperature in 3 minutes requiring 530W to maintain temperature
  • Sample can be placed directly onto heater ceramic top plate
  • Standard sizes from Ø1” to Ø6”
  • For use in high vacuum or inert atmosphere
  • Custom shapes and sizes available on request
  • Usually mounted on a base flange with integrated power, and water-cooling feedthroughs, but can be custom

Product Brochures

200.11-A - 1700°C Heater With CCC Element And Water Cooled Body

Click to Download our product brochure for the Thermic Edge 1000°C Carbon-Carbon Composite Element Heater (Head only).

SPECIFICATIONS

1700°C – Inert, HV, UHV – Heater Head Water Cooled
Part NoØA – Hot ZoneØB – Heater o.d.C – Heater ThicknessMountingVoltage MaxCurrent MaxPower Max
HTWM6-CCC-0126mm (1”)36.6mm52mmM6 stud17 volts33 amps561 Watts
HTWM6-CCC-01.538.1mm (1.5”)48.7mm52mmM6 stud40 volts30 amps1200 Watts
HTWM6-CCC-0250.8mm (2”)61.4mm52mmM6 stud60 volts35 amps2100 Watts

*In Vacuum @ 1900°C (Element Temp.)

1700°C – Inert, HV, UHV – Heater Head Water Cooled
Part NoØ Wafer sizeØA – Hot ZoneØB – Heater o.d.C – Heater ThicknessVoltage MaxCurrent MaxPower Max
HTSW-CCC-0377mm (3”)901494260251500
HTSW-CCC-04102mm (4”)1161754260402400
HTSW-CCC-05128mm (5”)1412004260603600
HTSW-CCC-06153mm (6”)1662254260804800
HTSW-CCC-07179mm (7”)19225142601106600
HTSW-CCC-08204mm (8”)21827742601408400

*In Vacuum @ 1200°C

All Graphite Cooled or Uncooled Heater with Graphite or Ceramic Top Plate and CCC Element

Advanced carbon-carbon composite element and high thermal conductivity technical ceramics and graphite grades allow top plate temperatures of up to 1900°C with a very fast ramp rate.

FEATURES

  • 1700°C Ceramic top plate temperature
  • Integrated type C thermocouple
  • Can be mounted in any orientation
  • Ø1” version shown is CF40 flange mounted and fits fully assembled through a Ø38mm port
  • Water-cooled feedthroughs and body as standard
  • Heats to 1700°C top plate temperature in 3 minutes requiring 530W to maintain temperature
  • Sample can be placed directly onto heater ceramic top plate
  • Standard sizes from Ø1” to Ø6”
  • For use in high vacuum or inert atmosphere
  • Custom shapes and sizes available on request
  • Usually mounted on a base flange with integrated power, and water-cooling feedthroughs, but can be custom

All heaters are supplied with power leads and internal thermocouples and can be supplied with power supplies and controllers.

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