Experts in Substrate Heating

Vacuum Furnaces

At Thermic Edge, we pride ourselves on being at the forefront of the vacuum furnace industry. Providing a complete service, our bespoke versatile ranges gives you the tools necessary for any application.

Graphite Vacuum Furnaces

Graphite Laboratory Vacuum Furnaces with graphite crucible or wafer sample hot zones for thermal processing, heat treatment, annealing & vacuum sintering.

Thermic Edge laboratory vacuum furnaces offer a range of graphite hot zones to suit a variety of uses. Our standard medium vacuum furnace with crucible size of Ø102 x 51mm has a maximum temperature of 2100˚c. We also offer an alternative deeper medium hot zone size of Ø60.5 x 75mm, a larger size of Ø 150 x 75mm and an extra large hot zone size of Ø180 x 140mm. We also offer flat wafer hot zones for Ø 4”, Ø 6” and Ø 8” sample sizes

The cylindrical graphite elements are extremely efficient and allow for fast ramps, extremely stable and using a dual hot zone improves temperature uniformity a deviation of < +/- 1%.


  • Temperatures up to 2600˚c
  • Base pressure <5×10 ̄²mBar
  • Automatic pump purge sequence to remove residual Oxygen
  • Ramp rate ≈ 120˚c/min
  • Processing in vacuum & atmospheric pressure
  • Laptop PC for full data logging and multi-step programmable thermal process control
  • Top loading furnace chamber
  • Fully water-cooled furnace, stainless steel chamber and lid
  • Electrically driven lid with interlock sensors
  • Crucible & wafer / flat sample heating
  • Simple & safe operation with full protection interlocks, ideal for Universities or inexperienced operators
  • Fully interlocked system providing safety for both user and system
  • Semi-Automatic control via HMI Touchscreen
  • Colour display combined Micro Pirani/piezo gauge
  • Light weight DC switch mode power supplies (no bulky transformers)
  • DC power supply controlled via Eurotherm Nanodac
  • High performance and responsive control
  • Manual pressure and gas flow rate regulation with automatic over pressure release valve
  • Compact design, lightweight & small footprint, but large hot zones

Standard Range


2000°c Medium Laboratory Vacuum Furnace with Graphite Hot Zone Crucible Furnace, 5kW DC PSU.
Graphite Hot Zone – Ø60.5 x 75mm OR Ø102mm x 51mm

2000°c Large Laboratory Vacuum Furnace with Graphite Hot Zone Crucible Furnace, 15kW DC PSU.
Graphite Hot Zone – Ø150 x 75mm

2000°c Extra Large Laboratory Vacuum Furnace with Graphite Hot Zone Crucible Furnace, 20kW DC PSU.
Graphite Hot Zone – Ø180 x 140mm


Ø 4” Graphite Hot Zone, 5kW DC PSU

Ø 6” Graphite Hot Zone, 10kW DC PSU

Ø 8” Graphite Hot Zone, 15kW DC PSU

Additional Options

  • Diffusion High Vacuum Pump (Ultimate Vacuum 5×10 ̄⁷mBar)
  • Turbo Pump (Ultimate Vacuum 5×10 ̄⁸mBar)
  • Additional process gas options
  • Pyrometer – Auto change over
  • Water chiller
  • Hot zone thermocouples

Wafer Sample Hot Zones

For wafer sample testing our laboratory vacuum furnaces use a CCC element enclosed in a graphite hot zone to heat both individual large Dia. samples and smaller samples held in a susceptor plate.

Wafer sample furnaces range from 4” to 8” Dia sample size, with dual zone option on 8”.

High Temperature Vacuum Furnace

3000˚c laboratory furnace uses the same footprint as the standard furnace but incorporates a few changes.

  • All graphite hot zone.
  • Above 2100˚c requires processing in an inert environment at atmospheric pressure.
  • Larger power supplies required whilst still fitting into a standard frame.
  • Use of pyrometer for high temperature measurement with auto changeover

System Operations & Functions

Thermic Edge’s range of laboratory vacuum furnaces provide a user-friendly interface promoting their ease of use via modern touchscreen HMI display which allows control of all furnace pumping, gas processing and venting features. With multiple screens for operation, interlock displays and mimic with valve states.

The HMI allows the user to control the automated pump down sequence which is designed to remove residual oxygen from the chamber and intern increasing the life of the hot zone and avoiding the possibility of oxidation occurring.

Two independent gas inputs are also controlled via the arm mounted HMI with their individual flows manually adjusted, via needle valves, to the user’s requirements. Pumping speeds are also regulated manually via a vacuum Speedi valve mounted on the front of the vacuum furnace, enabling manual control of chamber pressure and gas flow rates.

Temperature and datalogging are controlled via a Eurotherm Nanodac PID temperature controller / data logger which can be connected to a remote PC for data analysis. Software is provided to allow for multi-step process cycles to be programmed allowing for simple repeat testing and easy adjustment to programs.

The fully water-cooled vacuum chamber and power feedthroughs keep the exterior of the chamber at ambient temperature and preventing overheating, allowing for extended periods of operation.

Service Requirements

All laboratory vacuum furnaces require an electrical supply, chilled water supply and drain, Argon gas for venting, process gas supplies and exhaust line.


  • Total Supply Power : 6kva, 415v 3 phase
  • Water Connections: – ¾” BSPT threaded ends to both flow and return.
  • Flow rate min: 6 litres / min of water @ ambient temperature
  • Process gas inlet: ¼ Swagelok line with VCR Swagelok valve
  • Vent inlet: ¼ Swagelok line with VCR Swagelok valve.
  • For Pneumatics (if fitted) – 60 – 80 psi. compressed air – 6mm push fit.
  • N2/ Ar supply for venting/processing – <40 psi – ¼” Swagelok fitting
  • Pumping port size: 2.75” CF – KF25 adapter
  • System height (lid closed): 1140mm
  • System width: 1120mm
  • System depth: 720mm (Measured from rotameter knobs to water supply pipes
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