Thermic Edge Heater Stages

Thermic Edge offers a complete range of hot stage sample heaters for all deposition system applications. An important feature offered by Thermic Edge on our heater stages is water cooling, which has many benefits including:

• Integration with customer systems
• Defined pressure and flow rates to ensure sufficient cooling
• Use on all heater types including rotating heater heads
• Use with sample biasing
• Cooling power feedthrough to allow higher current
• Reduction of heat load on the chamber and other equipment

Water-cooled heaters can be mounted in any orientation and used with our full range of manipulators and biasing systems. Thermic Edge also supply chillers with our water-cooled stages where required.

If fast cool down of the samples is required, Thermic Edge offer a gas cooling option. Inert gas flows over the sample to cool it quickly, reducing process time. We work with the customer to provide suitable valves and fittings for your application.

The graphs shows acutal data for a Thermic Edge heater Stage with gas cooling. The red line shows the stage cooling profile with no gas flow present. The blue line shows the gas cooled profile. It takes 4 minutes 10 seconds for the heater to reach a safe venting temperature (300°C for this stage) with the gas flowing. Without gas flow it takes almost 20 minutes.