Versatile Heaters

Experts in Substrate Heating

Vacuum Heaters

At Thermic Edge, we pride ourselves on being at the forefront of the vacuum furnace industry. Providing a complete service, our bespoke versatile ranges gives you the tools necessary for any application.

At Thermic Edge, we have developed a range of cost-effective sample heaters that can be easily customised with optional extras, such as water cooling, sample rotation and various sample mounting options.

The Thermic Edge Versatile heater is also very high performance, with high power density (enabling very fast ramp up times), with low mass body (reducing cool down times) and high thermal uniformity over the entire hot zone.

Our sample heaters are manufactured using different body and element materials to suit a wide range of applications and temperatures, and are available as standard from two-inch to six-inch diameter.

Features

Standard hot zone sizes ranging from Ø2” (51 mm) up to Ø6” (152 mm)
Configurations for high vacuum, UHV and air (oxygen compatible)
Standard element materials are Inconel, carbon-carbon composite (CCC), pure silicon carbide (SiC³) CVD coated graphite and tungsten
Fast ramping and efficient
Supplied with suitable internal thermocouple to measure and control temperature (temperature readers and controllers also available)
Free standing or flange mounted

Can operate in any orientation
High uniformity sample heating area as standard (<2%)
Water cooling available to minimise heat load on chamber
Fully customisable with complete bespoke solutions available
Stage mountable where rotation, Z-shift and/or RF or DC bias are required
In-vacuum cable assemblies included
Built and tested in the UK

Customise Your Heater

Contact our technical sales team today if you need any assistance or a larger heater size. Additonal Options include, but are not limited to:

Water cooling to minimise heat load on chamber and other equipment
Sampe holder clips, masks or retainers
Flange or heater stage mouting (for rotation and sample transfer)
Sample bias (DC or RF up to 1000W)

Second thermocouple
Power Supply
Temperature Controller
Spare elements

Sample plate rotates above static element. In this example, clips are used to secure the substrates

Thermic Edge supply plates with apertures to hold and provide masking to samples if required.

Heaters can be used with the element exposed, and some cases samples can be placed directly onto elements

Specifications

800°C ceramic top plate temperature with Inconel element. For use in High vacuum, O2, N2, H2 environment or Air

Part No.	Hot zone Ø	O.D.(approx.)	Ceramic Top Plate	TC type
VH-2-800-IN-O2	2″	100 mm	ABN1000	K
VH-3-800-IN-O2	3″	125 mm	ABN1000	K
VH-4-800-IN-O2	4″	160 mm	ABN1000	K
VH-6-800-IN-O2	6″	190 mm	ABN1000	K

1000°C ceramic top plate temperature with graphite and SiC³ CVD coated element. For use in High vacuum, O2, N2, H2 environment or Air

Part No.	Hot zone Ø	O.D.(approx.)	Ceramic Top Plate	TC type
VH-2-1000-CCC-HV	2″	100 mm	ABN1000	K
VH-3-1000-CCC-HV	3″	125 mm	ABN1000	K
VH-4-1000-CCC-HV	4″	160 mm	ABN1000	K
VH-6-1000-CCC-HV	6″	190 mm	ABN1000	K

1000°C ceramic top plate temperature with CCC element. For use in High vacuum, N2 or inert atmosphere

Part No.	Hot zone Ø	O.D.(approx.)	Ceramic Top Plate	TC type
VH-2-1000-GS-O2	2″	100 mm	ABN1000	K
VH-3-1000-GS-O2	3″	125 mm	ABN1000	K
VH-4-1000-GS-O2	4″	160 mm	ABN1000	K
VH-6-1000-GS-O2	6″	190 mm	ABN1000	K

1600°C ceramic top plate temperature with CCC element. For use in High vacuum, N2 or inert atmosphere.

Part No.	Hot zone Ø	O.D.(approx.)	Ceramic Top Plate	TC type
VH-2-1600-CCC-HV	2″	100 mm	PBN	C
VH-3-1600-CCC-HV	3″	125 mm	PBN	C
VH-4-1600-CCC-HV	4″	160 mm	PBN	C
VH-6-1600-CCC-HV	6″	190 mm	PBN	C

1600°C ceramic top plate temperature with tungsten element. For use in High vacuum, N2, H2 or inert atmosphere. Good for UHV with top plate removed

Part No.	Hot zone Ø	O.D.(approx.)	Ceramic Top Plate	TC type
VH-2-1600-TU-UHV	2″	100 mm	PBN	C
VH-3-1600-TU-UHV	3″	125 mm	PBN	C
VH-4-1600-TU-UHV	4″	160 mm	PBN	C
VH-6-1600-TU-UHV	6″	190 mm	PBN	C

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