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Experts in Substrate Heating

Vacuum Heaters

At Thermic Edge, we pride ourselves on being at the forefront of the vacuum furnace industry. Providing a complete service, our bespoke versatile ranges gives you the tools necessary for any application.

Vacuum Heaters Overview

At Thermic Edge, we supply cost-effective, high uniformity Wafer Heaters, Vacuum Heaters and Sample Heaters to research and industry for thin film deposition and sample processing. Our Sample heaters can be supplied with retainers or clips to hold a range of semiconductor wafers or samples.

All heaters go through comprehensive testing. Our in-house testing capabilities include helium leak checking, full temperature testing using vacuum test system and uniformity testing using a FLIR thermal imaging camera. Thermic Edge is ISO 9001 Certified.

The Thermic Edge design team work closely with clients to provide:

  • Professionally managed projects from start to finish
  • Cost effective solutions using standard Thermic Edge components and assemblies where possible
  • Detailed technical drawings and written specifications
  • 3D CAD models
  • A heating solution that is supplied fully tested and ready to integrate with your system
  • Manual detailing installation and operation instructions
vacuum heater wireframe
wafer heater
wafer heating flange mounted sample heater
sample heater schematic

Versatile Heaters

800°C - 1600°C [ O2, Inert, HV, UHV ]

Versatile Heaters

800°C - 1600°C [O2, Inert, HV, UHV]

Nickel Chrome Heaters

800°C - 1000°C [ Air, Inert, HV ]

Nickel Chrome Heaters

800°C - 1000°C [ Air, Inert, HV ]

Button Heaters

800°C - 1400°C [ Air, HV, UHV ]

Button Heaters

800°C - 1400°C [ Air, HV, UHV ]

Halogen Lamp Heaters

900°C [ Air, Inert, Vacuum ]

Halogen Lamp Heaters

800°C - 1000°C [ Air, Inert, HV ]

All Ceramic Heaters

800°C - 1600°C [ Air, HV, UHV ]

All Ceramic Heaters

800°C - 1600°C [Air, HV, UHV]

High Temperature, High Uniformity, Water Cooled

1000°C - 1700°C [ Air, Inert, HV, ]

High Temperature, High Uniformity, Water Cooled

1000°C - 1700°C [ Air, Inert, HV, ]

PG-PBN Heaters

800°C - 1400°C [ Air, HV, UHV ]

PG-PBN Heaters

800°C - 1400°C [ Air, HV, UHV ]

Bespoke Heaters

Custom Specification Builds

Bespoke Heaters

Custom Specification Builds

Substrate Vacuum Heaters

Features

  • Standard direct contact sample heaters are available for sample sizes ranging from one inch (25.4 mm) up to six inch (152.4 mm) hot zones. Larger sizes available as special designs
  • Lamp heaters are supplied for radiating heating applications
  • Configurations for high vacuum, UHV, oxygen, air and corrosive environments
  • Standard element materials are Inconel, nickel chrome (NiCr), carbon-carbon composite (CCC), pure silicon carbide (SiC3) CVD coated graphite and tungsten
  • Temperatures up to 1600°C as standard (higher temperatures can be achieved on request)
  • Fast ramping and efficient
  • Supplied with suitable internal thermocouple to measure control temperature
  • Free standing, stud mounted or flange mounted
  • Basic elements up to complete systems
  • Good uniformity sample heating area as standard (<±2%). Extra high uniformity range (<±1%)
  • Water cooling available to minimise heat load on chamber
  • Larger sizes and different shapes available on request
  • Fully customisable with complete bespoke solutions available
  • Stage mountable where rotation, Z-shift and RF or DC bias are required
  • In-vacuum and air side cable assemblies included
  • Built and tested in the UK

Committed to Quality

All heaters go through comprehensive testing. Our in-house testing capabilities include helium leak checking, full temperature testing using vacuum test system and uniformity testing using a FLIR thermal imaging camera. Thermic Edge are ISO 9001:2015 registered.

Sample Heating Stages

Thermic Edge offers a complete range of sample heating hot stages for all thin film deposition system applications. Heaters and samples can be mounted in any orientation and the Thermic Edge range of manipulators provides cost effective options for sample rotation, heater rotation, sample transfer and sample/heater positioning.

Sample heating stages can be offered with sample biasing (RF or DC) up to 1000W and complete with temperature controller and power supply. For heaters and stages with RF biasing, full shielding and power/thermocouple line filtering can be supplied. Water cooled heaters can be supplied with chillers.

Bespoke

Thermic Edge specialises in providing bespoke solutions for heating applications that cannot be fulfilled using standard heaters and stages. The Thermic Edge design team works closely with clients to provide:

  • Professionally managed projects
  • Cost-effective solutions using standard Thermic Edge components and assemblies where possible
  • Detailed technical drawings and written specifications
  • 3D CAD models (if required)
  • A heating solution that is supplied fully tested and ready to integrate with your system

Manual detailing installation, specification, and operation instructions

Temperature Controller

Using a temperature controller, substrate heating can be customised to prepare thin films for chemical vapour deposition systems depending on specification requirements.

Additional Information

Contact our technical sales team today if you need any assistance or a larger heater size.

Additional Options include, but are not limited to:

  • Water cooling to minimise heat load on chamber and other equipment
  • Sample holder clips, masks or retainers
  • Flange or heater stage mouting (for rotation and sample transfer)
  • Sample bias (DC or RF up to 1000W)
  • Power Supply
  • Temperature Controller
  • Spare elements
  • Second thermocouple

DOWNLOADABLES

204.03-A - A4 - Elements Overview

Click to Download our product brochure for all Thermic Edge Element materials.

Our Mission

At Thermic Edge, we pride ourselves on being at the forefront of the Vacuum Heating Technology Industry. We provide a complete service, our bespoke and versatile ranges give you the tools necessary for any inert, HV or UHV application.

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