Experts in Substrate Heating

Vacuum Furnaces

At Thermic Edge, we pride ourselves on being at the forefront of the vacuum furnace industry. Providing a complete service, our bespoke versatile ranges gives you the tools necessary for any application.

Benchtop Vacuum Furnaces

The 2000˚c Benchtop Vacuum Furnace provides a high performance cost-effective solution to smaller sample size heating. Our standard benchtop vacuum furnace will heat a sample wafer or a crucible up to 2000˚c. We also offer a 3000 ˚c version as a special option.

Thermic Edge supply a range of Benchtop Furnaces for use in smaller laboratories for the use on small sample testing, thermal processing, vacuum sintering and heat treatment in an extremally high purity and clean environment.

The Benchtop offers a small footprint, light weight unit with simple one touch control via HMI touchscreen display with integrated power supply, rotary pump and manual flow control. Temperature control and datalogging is performed via a Eurotherm Nanodac controller with option for remote PC control and data analysis.

Features

  • Temperatures up to 2000˚c
  • Ramp rate ≈ 100˚c/min
  • Base pressure <5×10 ̄²mBar
  • Automatic pump purge sequence to remove residual Oxygen
  • Ramp rate ≈ 60˚c/min (Can be faster with bigger power supply)
  • Processing in vacuum & atmospheric pressure
  • Top loading furnace chamber
  • Fully Water-cooled furnace, stainless steel chamber and lid
  • Electrically driven lid with interlock sensors
  • Crucible & wafer / flat sample heating
  • Simple & safe operation with full protection interlocks, ideal for Universities or inexperienced operators
  • Fully interlocked system providing safety for both user and system
  • Semi-Automatic control via HMI Touchscreen
  • Light weight DC switch mode power supplies (no bulky transformers)
  • DC power supply controlled via Eurotherm Nanodac
  • High performance and responsive control
  • Manual pressure and gas flow rate regulation with automatic over pressure release valve
  • Compact design, lightweight & small footprint
    Options

Standard Range

cRUCIBLE FURNACES

2000˚c Graphite Crucible Furnace 1.5kW DC PSU – Ø20 x 30mm, Ø30 x 40mm, Ø40 x 50mm

3000˚c Graphite Crucible Furnace 6kW DC PSU – Ø20 x 30mm, Ø30 x 40mm, Ø40 x 50mm

3000˚c TiCᶾ Crucible Furnace 6kW DC PSU – Ø20 x 30mm, Ø30 x 40mm, Ø40 x 50mm

WAFER FURNACES

2000˚c Graphite Wafer Furnace 1.5kW DC PSU – 1”, 2” & 3”

2000˚c Tungsten Wafer Furnace 1.5kW DC PSU – 1”, 2” & 3”

Additional Options

  • Turbo Pump (Ultimate Vacuum 5×10 ̄⁸mBar)
  • Additional process gas options
  • 3000˚c TiC Coated Graphite hot zone
  • Laptop PC for full data logging and multi-step programmable thermal process control
  • Pyrometer – Auto change over
  • Water chiller
  • Hot zone thermocouples
  • Oxygen compatible to 1400c with SiC coated graphite hot zone and alumina insulation

Gas Processing

The Benchtop Furnace offers flexibility in its process gas options using the Gas Supply Box to allow multiple gasses to be connected and only a single gas supplied into the rear of the furnace. The chamber has as single gas supply into the hot zone with a manual flow control but using the Gas Supply Box the user can switch between different process gasses during their heating process all controlled by the HMI touchscreen.

Service Requirements

All Benchtop laboratory vacuum furnaces require an electrical supply, chilled water supply and drain, Argon gas for venting, process gas supplies and exhaust line.

Specifications

  • Total Supply Power : 2.0kva, 220v single phase 13A
  • Water Connections: – ¾” BSPT threaded ends to both flow and return.
  • Flow rate min: 6 litres / min of water @ ambient temperature
  • Process gas inlet: ¼ Swagelok line with VCR Swagelok valve
  • Vent inlet: ¼ Swagelok line with VCR Swagelok valve.
  • For Pneumatics (if fitted) – 60 – 80 psi. compressed air – 6mm push fit.
  • N2/ Ar supply for venting/processing – <40 psi – ¼” Swagelok fitting
  • Pumping port size: 2.75” CF – KF25 adapter
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